System Integration in Micro- and Nanotechnology 2

Content

Introduction to system integration (novel processes and applications)

Assembly of hybrid microsystems

Packaging processes

Applications:

  • Lab-on-chip systems
  • Microoptical systems
  • Silicon Photonics

Novel integration processes:

  • Direct Laser Writing
  • Self Assembly

Learning objectives

The students acquire knowledge of novel system integration technologies and their application in microoptic and microfluidic systems.

Language of instructionGerman
Bibliography

N.-T. Nguyen, Fundamentals and Applications of Microfluidics, Artech House

G. T. Reed, Silicon Photonics: An Introduction, Wiley